Art
J-GLOBAL ID:201802289617516215   Reference number:18A0930289

In2O3-Based Transparent Conducting Oxide Films with High Electron Mobility Fabricated at Low Process Temperatures

低プロセス温度で作製した高電子移動度のIn_2O_3ベース透明導電性酸化物膜【JST・京大機械翻訳】
Author (3):
Material:
Volume: 215  Issue:Page: e1700506  Publication year: 2018 
JST Material Number: D0774A  ISSN: 1862-6300  CODEN: PSSABA  Document type: Article
Article type: 原著論文  Country of issue: Germany, Federal Republic of (DEU)  Language: ENGLISH (EN)
Abstract/Point:
Abstract/Point
Japanese summary of the article(about several hundred characters).
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The emerging technological dem...
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JST classification (1):
JST classification
Category name(code) classified by JST.
Oxide thin films 
Terms in the title (4):
Terms in the title
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