Art

J-GLOBAL ID：201802290776842908   Reference number：18A1611905

Growth-Parameter Dependence of Polarity and Electronic Transports in ZnO Thin Films Deposited by Magnetron Sputtering

マグネトロンスパッタリングにより堆積したZnO薄膜における極性と電子輸送の成長パラメータ依存性【JST・京大機械翻訳】

Author (14)： Ohsawa Takeo (National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba 305-0044, Japan) ,  Ohsawa Takeo (NIMS Saint-Gobain Research Center of Excellence for Advanced Materials, NIMS, 1-2-1 Sengen, Tsukuba, 305-0047, Japan) ,  Tsunoda Kei (National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba 305-0044, Japan) ,  Tsunoda Kei (Graduate School of Science and Engineering, Hosei University, Koganei, Tokyo 184-8584, Japan) ,  Dierre Benjamin (NIMS Saint-Gobain Research Center of Excellence for Advanced Materials, NIMS, 1-2-1 Sengen, Tsukuba, 305-0047, Japan) ,  Grachev Sergey (NIMS Saint-Gobain Research Center of Excellence for Advanced Materials, NIMS, 1-2-1 Sengen, Tsukuba, 305-0047, Japan) ,  Grachev Sergey (Surface du Verre et Interfaces, UMR 125 CNRS/Saint-Gobain Recherche, 39 quai Lucien Lefranc, F-93303 Aubervilliers Cedex, France) ,  Montigaud Herve (NIMS Saint-Gobain Research Center of Excellence for Advanced Materials, NIMS, 1-2-1 Sengen, Tsukuba, 305-0047, Japan) ,  Montigaud Herve (Surface du Verre et Interfaces, UMR 125 CNRS/Saint-Gobain Recherche, 39 quai Lucien Lefranc, F-93303 Aubervilliers Cedex, France) ,  Ishigaki Takamasa (Graduate School of Science and Engineering, Hosei University, Koganei, Tokyo 184-8584, Japan) ,  Ohashi Naoki (National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba 305-0044, Japan) ,  Ohashi Naoki (NIMS Saint-Gobain Research Center of Excellence for Advanced Materials, NIMS, 1-2-1 Sengen, Tsukuba, 305-0047, Japan) ,  Ohashi Naoki (Department of Applied Science for Electronics and Materials, Kyushu University, 6-1 Kasuga-kouen, Kasuga, Fukuoka 816-8580, Japan) ,  Ohashi Naoki (Materials Research Center for Element Strategy (MCES), Mailbox SE-6, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-0026, Japan)
Material： Physica Status Solidi. A. Applications and Materials Science  (Physica Status Solidi. A.)
Volume： 215  Issue： 16  Page： e1700838  Publication year： 2018 
JST Material Number： D0774A  ISSN： 1862-6300  CODEN： PSSABA  Document type： Article
Article type： 原著論文  Country of issue： Germany, Federal Republic of (DEU)  Language： ENGLISH (EN)

Abstract/Point： Growth-parameter dependence of...

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Thesaurus term： photoelectron ,  carrier density ,  *thin film ,  doping ,  lattice constant ,  substrate(plate) ,  zinc oxide ,  *sputtering ,  *polarity ,  crystal ,  *magnetron sputtering ,  electrical conductivity
Semi thesaurus term： 表面形態 ,  輸送特性 ,  *電子輸送 , 【Automatic Indexing@JST】

Author keywords (4)： films ,  magnetron sputtering ,  polarity ,  zinc oxide

JST classification (2)： Oxide thin films  (BK14050P) ,  Semiconductor thin films  (BK14040E)

Terms in the title (7)： マグネトロンスパッタリング ,  堆積 ,  ZnO薄膜 ,  極性 ,  電子輸送 ,  成長 ,  パラメータ依存性