Pat
J-GLOBAL ID:201803010162243234

誘電体薄膜

Inventor:
Applicant, Patent owner:
Gazette classification:特許公報
Application number (International application number):2014171406
Publication number (International publication number):2016044350
Patent number:6308554
Application date: Aug. 26, 2014
Publication date: Apr. 04, 2016
Claim (excerpt):
【請求項1】 Biを含む誘電体層とBiの拡散を抑止する元素を含むバリア層とを交互積層した誘電体薄膜。
IPC (4):
C23C 14/08 ( 200 6.01) ,  H01B 3/12 ( 200 6.01) ,  H01G 4/33 ( 200 6.01) ,  H01G 4/12 ( 200 6.01)
FI (6):
C23C 14/08 K ,  H01B 3/12 303 ,  H01B 3/12 318 Z ,  H01G 4/06 102 ,  H01G 4/12 397 ,  H01G 4/12 394
Patent cited by the Patent:
Cited by applicant (6)
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