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J-GLOBAL ID：201902005306141385   Reference number：19S2780449

Preparation and dielectric and electrooptic properties of bi4ti3o12 films by electron cyclotron resonance plasma sputtering deposition

Author (6)： Masuda, Yoichiro (Department of Electrical Engineering, Hachinohe Institute of Technology) ,  Baba, Akira (Department of Electrical Engineering, Hachinohe Institute of Technology) ,  Masumoto, Hiroshi (Institute for Material Research, Tohoku University) ,  Goto, Takashi (Institute for Material Research, Tohoku University) ,  Hirai, Toshio (Institute for Material Research, Tohoku University) ,  Minakata, Makoto (Institute of Electrical Communication, Tohoku University)
Material： Japanese Journal of Applied Physics
Volume： 30  Issue： 9S  Page： 2212-2215  Publication year： 1991 
JST Material Number： SCOPUS  ISSN： 0021-4922 
Language： English (EN)