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J-GLOBAL ID：201902008801432174   Reference number：19S2946318

Reaction Mechanism of Chemical Vapor Deposition Using Tetraethylorthosilicate and Ozone at Atmospheric Pressure

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Author (3)：
Kawahara, Takaaki

About Kawahara, Takaaki

(Central Research Laboratory, Mitsubishi Electric Corp)

About Central Research Laboratory, Mitsubishi Electric Corp

, 
Yuuki, Akimasa

About Yuuki, Akimasa

(Central Research Laboratory, Mitsubishi Electric Corp)

About Central Research Laboratory, Mitsubishi Electric Corp

, 
Matsui, Yasuji

About Matsui, Yasuji

(Central Research Laboratory, Mitsubishi Electric Corp)

About Central Research Laboratory, Mitsubishi Electric Corp


Material：
Japanese Journal of Applied Physics

About Japanese Journal of Applied Physics


Volume： 31  Issue： 9 R  Page： 2925-2930  Publication year： 1992 
JST Material Number： SCOPUS  ISSN： 0021-4922 
Language： English (EN)

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