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J-GLOBAL ID：201902011351193329   Reference number：19S2821143

Isotope-selective infrared multiple photon decomposition of hexafluorodisilane

Author (6)： Kamioka, Masatsugu (Institute of Physical and Chemical Research) ,  Kamioka, Masatsugu (Shin-Etsu Chemical Co. Ltd.) ,  Ishikawa, Yo-Ichi (Institute of Physical and Chemical Research) ,  Kaetsu, Hayato (Institute of Physical and Chemical Research) ,  Isomura, Shohei (Institute of Physical and Chemical Research) ,  Arai, Shigeyoshi (Institute of Physical and Chemical Research)
Material： Journal of Physical Chemistry
Volume： 90  Issue： 22  Page： 5727-5730  Publication year： 1986 
JST Material Number： SCOPUS  ISSN： 0022-3654 
Language： English (EN)