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J-GLOBAL ID：201902011818554312   Reference number：19S3002669

A scanning photon microscope for non-destructive observations of crystal defect and interface trap distributions in silicon wafers

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Author (3)：
Kinameri, K.

About Kinameri, K.

(Central Res. Lab., Hitachi Ltd.)

About Central Res. Lab., Hitachi Ltd.

, 
Munakata, C.

About Munakata, C.

(Central Res. Lab., Hitachi Ltd.)

About Central Res. Lab., Hitachi Ltd.

, 
Mayama, K.

About Mayama, K.


Material：
Journal of Physics E: Scientific Instruments

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Volume： 21  Issue： 1  Page： 91-97  Publication year： 1988 
JST Material Number： SCOPUS  ISSN： 0022-3735 
Language： English (EN)
Terms in the title (1)：
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Keywords automatically extracted from the title.
TRAP

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