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J-GLOBAL ID：201902011903338360   Reference number：19S2744559

Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

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Author (3)：
Minami, Tadatsugu

About Minami, Tadatsugu

(Department of Electrical Engineering, Kanazawa Institute of Technology)

About Department of Electrical Engineering, Kanazawa Institute of Technology

, 
Nanto, Hidehito

About Nanto, Hidehito

(Department of Electrical Engineering, Kanazawa Institute of Technology)

About Department of Electrical Engineering, Kanazawa Institute of Technology

, 
Takata, Shinzo

About Takata, Shinzo

(Department of Electrical Engineering, Kanazawa Institute of Technology)

About Department of Electrical Engineering, Kanazawa Institute of Technology


Material：
Japanese Journal of Applied Physics

About Japanese Journal of Applied Physics


Volume： 23  Issue： 5  Page： L280-L282  Publication year： 1984 
JST Material Number： SCOPUS  ISSN： 0021-4922 
Language： English (EN)
Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
RF

About RF


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