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J-GLOBAL ID：201902013522791729   Reference number：19S3119948

Structural and Electrical Properies of Photo-CVD Silicon Nitride Film

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Author (3)：
Hamano, Kuniyuki

About Hamano, Kuniyuki

(NEC Corporation, VLSI Development Division)

About NEC Corporation, VLSI Development Division

, 
Numazawa, Yoichiro

About Numazawa, Yoichiro

(NEC Corporation, VLSI Development Division)

About NEC Corporation, VLSI Development Division

, 
Yamazaki, Koji

About Yamazaki, Koji

(NEC Corporation, VLSI Development Division)

About NEC Corporation, VLSI Development Division


Material：
Japanese Journal of Applied Physics

About Japanese Journal of Applied Physics


Volume： 23  Issue： 9 R  Page： 1209-1215  Publication year： 1984 
JST Material Number： SCOPUS  ISSN： 0021-4922 
Language： English (EN)

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