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J-GLOBAL ID：201902017113805306   Reference number：19S2925868

Effect of dilution gases in methane on the deposition of diamond-like carbon in a microwave discharge II: Effect of hydrogen

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Author (2)：
Matsumoto, Osamu

About Matsumoto, Osamu

(Department of Chemistry, Aoyama Gakuin University)

About Department of Chemistry, Aoyama Gakuin University

, 
Katagiri, Tsutomu

About Katagiri, Tsutomu

(Department of Chemistry, Aoyama Gakuin University)

About Department of Chemistry, Aoyama Gakuin University


Material：
Thin Solid Films

About Thin Solid Films


Volume： 146  Issue： 3  Page： 283-289  Publication year： 1987 
JST Material Number： SCOPUS  ISSN： 0040-6090  CODEN： THSFA 
Language： English (EN)

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