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J-GLOBAL ID：201902019090519931   Reference number：19S3016670

High precision optical surface sensor

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Author (4)：
Kohno, Tsuguo

About Kohno, Tsuguo

(Kanazawa University)

About Kanazawa University

, 
Ozawa, Norimitsu

About Ozawa, Norimitsu

(Mechanical Engineering Laboratory)

About Mechanical Engineering Laboratory

, 
Miyamoto, Kozo

About Miyamoto, Kozo

(Kosaka Laboratory Ltd.)

About Kosaka Laboratory Ltd.

, 
Musha, Tohru

About Musha, Tohru

(Olympus Optical Company Ltd.)

About Olympus Optical Company Ltd.


Material：
Applied Optics

About Applied Optics


Volume： 27  Issue： 1  Page： 103-108  Publication year： 1988 
JST Material Number： SCOPUS  ISSN： 1559-128X 
Language： English (EN)

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