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J-GLOBAL ID：201902100600472368   Reference number：19S0861459

Structure and electrical properties of pulsed laser deposited amorphous carbon nitride thin films

Author (4)： Aoi, Yoshifumi (Department of Materials Chemistry, Faculty of Science and Technology, Ryukoku University) ,  Ono, Kojiro (Department of Materials Chemistry, Faculty of Science and Technology, Ryukoku University) ,  Sakurada, Kunio (Department of Materials Chemistry, Faculty of Science and Technology, Ryukoku University) ,  Kamijo, Eiji (Department of Materials Chemistry, Faculty of Science and Technology, Ryukoku University)
Material： Materials Research Society Symposium - Proceedings
Volume： 750  Page： 285-290  Publication year： 2002 
JST Material Number： SCOPUS  ISSN： 0272-9172  CODEN： MRSPD 
Country of issue： United States (USA)  Language： English (EN)

Terms in the title (1)： LASER