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J-GLOBAL ID：201902100859945736   Reference number：19S2600188

Effects of oxygen concentration on growth of Bi4Ti3O12 thin films by metalorganic chemical vapor deposition

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Author (4)：
Muhammet, Rusul

About Muhammet, Rusul

(Department of Electrical Engineering, Nagaoka University of Technology)

About Department of Electrical Engineering, Nagaoka University of Technology

, 
Nakamura, Takashi

About Nakamura, Takashi

(ROHM Co., Ltd)

About ROHM Co., Ltd

, 
Shimizu, Masaru

About Shimizu, Masaru

(Department of Electronics, Kyoto University)

About Department of Electronics, Kyoto University

, 
Shiosaki, Tadashi

About Shiosaki, Tadashi

(Department of Electronics, Kyoto University)

About Department of Electronics, Kyoto University


Material：
Japanese Journal of Applied Physics

About Japanese Journal of Applied Physics


Volume： 33  Issue： 9 S  Page： 5215-5218  Publication year： 1994 
JST Material Number： SCOPUS  ISSN： 0021-4922 
Language： English (EN)

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