Art

J-GLOBAL ID：201902106379139398   Reference number：19S2402235

Low-pressure measurement limits for silicon piezoresistive circular diaphragm sensors

Author (7)： Matsuoka, Y. (Instrument Division, Hitachi Ltd.) ,  Yamamoto, Y. (Instrument Division, Hitachi Ltd.) ,  Shimada, S. (Instrument Division, Hitachi Ltd.) ,  Tanabe, M. (Hitachi Research Laboratory, Hitachi Ltd.) ,  Yamada, K. (Hitachi Research Laboratory, Hitachi Ltd.) ,  Yasukawa, A. (Mechanical Engineering Research Laboratory, Hitachi Ltd.) ,  Matsuzaka, H. (Hitachi Instruments Engineering Co Ltd.)
Material： Journal of Micromechanics and Microengineering
Volume： 5  Issue： 1  Page： 32-35  Publication year： 1995 
JST Material Number： SCOPUS  ISSN： 0960-1317 
Language： English (EN)