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J-GLOBAL ID：201902106965069919   Reference number：19S2539698

Cross section measurements for electron-impact dissociation of sif4 into neutral radicals

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Author (2)：
Nakano, T.

About Nakano, T.

(Department of Electrical Engineering, Nagoya University)

About Department of Electrical Engineering, Nagoya University

, 
Sugai, H.

About Sugai, H.

(Department of Electrical Engineering, Nagoya University)

About Department of Electrical Engineering, Nagoya University


Material：
Journal of Physics D: Applied Physics

About Journal of Physics D: Applied Physics


Volume： 26  Issue： 11  Page： 1909-1915  Publication year： 1993 
JST Material Number： SCOPUS  ISSN： 0022-3727 
Language： English (EN)

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