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J-GLOBAL ID：201902107130173185   Reference number：19S2348418

Nondestructive diagnostic method using ac surface photovoltage for detecting metallic contaminants in silicon wafers

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Author (2)：
Shimizu, Hirofumi

About Shimizu, Hirofumi

(Semiconductor and Integrated Circuits Division, Hitachi, Ltd.)

About Semiconductor and Integrated Circuits Division, Hitachi, Ltd.

, 
Munakata, Chusuke

About Munakata, Chusuke

(Central Research Laboratory, Hitachi, Ltd.)

About Central Research Laboratory, Hitachi, Ltd.


Material：
Journal of Applied Physics

About Journal of Applied Physics


Volume： 73  Issue： 12  Page： 8336-8339  Publication year： 1993 
JST Material Number： SCOPUS  ISSN： 0021-8979 
Language： English (EN)
Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
Ac

About Ac


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