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J-GLOBAL ID：201902111010181866   Reference number：19S2538781

Hybrid lithography system using e-beam direct writer and optical stepper

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Author (4)：
Kaneko, Toshio

About Kaneko, Toshio

(Hitachi Ltd)

About Hitachi Ltd

, 
Shibata, Yukinobu

About Shibata, Yukinobu

(Hitachi Ltd)

About Hitachi Ltd

, 
Sakitani, Yoshio

About Sakitani, Yoshio

(Hitachi Ltd)

About Hitachi Ltd

, 
Kurosaki, Toshiei

About Kurosaki, Toshiei

(Hitachi Ltd)

About Hitachi Ltd


Material：
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

About IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop


Page： 142-147  Publication year： 1993 
JST Material Number： SCOPUS  ISBN： 0780313674 

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