Art

J-GLOBAL ID：201902111672502166   Reference number：19S2472447

Influence of Ar Metastable on the Discharge Structure in Ar and N 2 Mixture in RF Discharges at 13.56 MHz

Author (3)： Tochikubo, Fumiyoshi (Department of Electrical Engineering, Tokyo Metropolitan University) ,  Nakano, Nobuhiko (Department of Electrical Engineering, Tokyo Metropolitan University) ,  Nakano, Nobuhiko (Department of Electrical Engineering, Tokyo Metropolitan University)
Material： Japanese Journal of Applied Physics
Volume： 33  Issue： 7S  Page： 4271-  Publication year： 1994 
JST Material Number： SCOPUS  ISSN： 0021-4922 
Language： English (EN)

Terms in the title (2)： Ar ,  RF