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J-GLOBAL ID：201902113488102573   Reference number：19S2859718

Metrology of atomic force microscopy for si nano-structures

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Author (5)：
Nagase, Masao

About Nagase, Masao

(NTT LSI Laboratories)

About NTT LSI Laboratories

, 
Namatsu, Hideo

About Namatsu, Hideo

(NTT LSI Laboratories)

About NTT LSI Laboratories

, 
Kurihara, Kenji

About Kurihara, Kenji

(NTT LSI Laboratories)

About NTT LSI Laboratories

, 
Iwadate, Kazumi

About Iwadate, Kazumi

(NTT LSI Laboratories)

About NTT LSI Laboratories

, 
Murase, Katsumi

About Murase, Katsumi

(NTT LSI Laboratories)

About NTT LSI Laboratories


Material：
Japanese Journal of Applied Physics

About Japanese Journal of Applied Physics


Volume： 34  Issue： 6S  Page： 3382-3387  Publication year： 1995 
JST Material Number： SCOPUS  ISSN： 0021-4922 
Language： English (EN)
Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
Si

About Si


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