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J-GLOBAL ID：201902115541063464   Reference number：19S0843531

Preparation of layered B/C/N thin films on nickel single crystal by LPCVD

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Author (5)：
Kawano, Takanori

About Kawano, Takanori

(Grad. Course Electron./Appl. Physics, Osaka Electro-Commun. University)

About Grad. Course Electron./Appl. Physics, Osaka Electro-Commun. University

, 
Okamoto, Yuji

About Okamoto, Yuji

(Grad. Course Electron./Appl. Physics, Osaka Electro-Commun. University)

About Grad. Course Electron./Appl. Physics, Osaka Electro-Commun. University

, 
Kawaguchi, Masayuki

About Kawaguchi, Masayuki

(Academic Frontier Promotion Center, Osaka Electro-Commun. University)

About Academic Frontier Promotion Center, Osaka Electro-Commun. University

, 
Enomoto, Hiroyuki

About Enomoto, Hiroyuki

(Academic Frontier Promotion Center, Osaka Electro-Commun. University)

About Academic Frontier Promotion Center, Osaka Electro-Commun. University

, 
Bando, Hiroyuki

About Bando, Hiroyuki

(Academic Frontier Promotion Center, Osaka Electro-Commun. University)

About Academic Frontier Promotion Center, Osaka Electro-Commun. University


Material：
Solid State Sciences

About Solid State Sciences


Volume： 4  Issue： 11-12  Page： 1521-1527  Publication year： 2002 
JST Material Number： SCOPUS  ISSN： 1293-2558  CODEN： SSSCF 
Country of issue： France (FRA)  Language： English (EN)
Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
LPCVD

About LPCVD


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