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J-GLOBAL ID：201902118014133518   Reference number：19S2852758

Multifunction of aluminum nitride thin films deposited on MoSi2 substrates - ceramic skin -

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Author (4)：
Akiyama, Morito

About Akiyama, Morito

(Kyushu Natl Industrial Research Inst)

About Kyushu Natl Industrial Research Inst

, 
Nonaka, Kazuhiro

About Nonaka, Kazuhiro

(Kyushu Natl Industrial Research Inst)

About Kyushu Natl Industrial Research Inst

, 
Shobu, Kazuhisa

About Shobu, Kazuhisa

(Kyushu Natl Industrial Research Inst)

About Kyushu Natl Industrial Research Inst

, 
Watanabe, Tadahiko

About Watanabe, Tadahiko

(Kyushu Natl Industrial Research Inst)

About Kyushu Natl Industrial Research Inst


Material：
Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan

About Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan


Volume： 103  Issue： 1201  Page： 974-976  Publication year： 1995 
JST Material Number： SCOPUS  ISSN： 0914-5400  CODEN： NSKRE 

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