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J-GLOBAL ID：201902121272824534   Reference number：19S2499811

A thin film polyimide based capacitive type relative humidity sensor

Author (6)： Kuroiwa, Takaaki (Yamatake-Honeywell Co., Ltd.) ,  Hayashi, Tomohito (Yamatake-Honeywell Co., Ltd.) ,  Ito, Akihiko (Yamatake-Honeywell Co., Ltd.) ,  Matsuguchi, Masanobu (Department of Applied Chemistry, Faculty of Engineering Ehime University) ,  Sadaoka, Yoshihiko (Department of Applied Chemistry, Faculty of Engineering Ehime University) ,  Sakai, Yoshiro (Department of Applied Chemistry, Faculty of Engineering Ehime University)
Material： Sensors and Actuators: B. Chemical
Volume： 13  Issue： 1-3  Page： 89-91  Publication year： 1993 
JST Material Number： SCOPUS  ISSN： 0925-4005  CODEN： SABCE 
Language： English (EN)