Art

J-GLOBAL ID：201902201113966194   Reference number：19S0125942

The approach for direct stacking of high-k dielectrics on Si

Author (5)： Nagasato, Y. (Department of Electrical and Electronic Engineering, Tokyo University of Agriculture and Technology) ,  Iwazaki, Y. (Department of Electrical and Electronic Engineering, Tokyo University of Agriculture and Technology) ,  Hasumi, M. (Department of Electrical and Electronic Engineering, Tokyo University of Agriculture and Technology) ,  Ueno, T. (Department of Electrical and Electronic Engineering, Tokyo University of Agriculture and Technology) ,  Kuroiwa, K. (Department of Electrical and Electronic Engineering, Tokyo University of Agriculture and Technology)
Material： ECS Transactions
Volume： 11  Issue： 4  Page： 25-33  Publication year： 2007 
JST Material Number： SCOPUS  ISSN： 1938-5862  ISBN： 9781566775700 
Country of issue： United States (USA)  Language： English (EN)

Terms in the title (1)： Si