Art

J-GLOBAL ID：201902204882327853   Reference number：19S1665275

Production of extremely low energy electron beam with silicon-based field emitter arrays and its application to space charge neutralization of low-energy and high-current ion beam

Author (7)： Gotoh, Yasuhito (Department of Electronic Science and Engineering, Kyoto University) ,  Taguchi, Shuhei (Department of Electronic Science and Engineering, Kyoto University) ,  Ikeda, Keita (Department of Electronic Science and Engineering, Kyoto University) ,  Kitagawa, Takayuki (Department of Electronic Science and Engineering, Kyoto University) ,  Tsuji, Hiroshi (Department of Electronic Science and Engineering, Kyoto University) ,  Ishikawa, Junzo (Department of Information Science and Engineering, Chubu University) ,  Sakai, Shigeki (Nissin Ion Equipment Co., Ltd.)
Material： Technical Digest - 25th International Vacuum Nanoelectronics Conference, IVNC 2012
Page： 86-87  Publication year： 2012 
JST Material Number： SCOPUS  ISBN： 9781467319812 
Country of issue： United States (USA)  Language： English (EN)

Terms in the title (2)： ITS ,  SPACE