Art
J-GLOBAL ID：201902205291792022   Reference number：19S0465502

Neutral beam technology - Defect-free nanofabrication for novel nano-materials and nano-devices

  • Publisher site Copy service
  • Access JDreamⅢ for advanced search and analysis.
Author (1)：
Samukawa, Seiji

About Samukawa, Seiji

(Institute of Fluid Science, Tohoku University, WPI-Advanced Institute for Materials Research)

About Institute of Fluid Science, Tohoku University, WPI-Advanced Institute for Materials Research


Material：
International Symposium on VLSI Technology, Systems, and Applications, Proceedings

About International Symposium on VLSI Technology, Systems, and Applications, Proceedings


Volume： 2015-June  Publication year： 2015 
JST Material Number： SCOPUS  ISSN： 1930-8868  ISBN： 9781479973750 
Country of issue： United States (USA)  Language： English (EN)

Return to Previous Page

TOP

BOTTOM