Art

J-GLOBAL ID：201902205483871210   Reference number：19S0953430

Growth and electrical properties of AlOx grown by mist chemical vapor deposition

Author (5)： Kawaharamura, Toshiyuki (Institute for Nanotechnology, Kochi University of Technology) ,  Furuta, Mamoru (Institute for Nanotechnology, Kochi University of Technology) ,  Furuta, Mamoru (School of Environmental Science and Engineering, Kochi University of Technology) ,  Uchida, Takayuki (School of Systems Engineering, Kochi University of Technology) ,  Sanada, Masaru (School of Systems Engineering, Kochi University of Technology)
Material： AIP Advances
Volume： 3  Issue： 3  Publication year： 2013 
JST Material Number： SCOPUS  ISSN： 2158-3226 
Country of issue： United States (USA)  Language： English (EN)

Terms in the title (1)： MISt