Art

J-GLOBAL ID：201902207516624631   Reference number：19S0421538

SiO2/SiN multilayer-stack infrared absorber integrated on Pb(Zr0.4,Ti0.6)O3 film pyroelectric sensors on γ-Al2O3/Si substrate

Author (5)： Oishi, Koji (Electrical and Electronic Information Engineering, Toyohashi University of Technology) ,  Yonemaru, Shota (Electrical and Electronic Information Engineering, Toyohashi University of Technology) ,  Ishida, Makoto (Electrical and Electronic Information Engineering, Toyohashi University of Technology) ,  Ishida, Makoto (Electronics-Inspired Interdisciplinary Research Institute) ,  Akai, Daisuke (Electronics-Inspired Interdisciplinary Research Institute)
Material： Sensors and Materials
Volume： 27  Issue： 2  Page： 217-227  Publication year： 2015 
JST Material Number： SCOPUS  ISSN： 0914-4935 
Country of issue： Japan (JPN)  Language： English (EN)

Terms in the title (5)： SiO2 ,  SiN ,  Pb ,  O3 ,  Si