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J-GLOBAL ID：201902207695782104   Reference number：19S1317507

Silicon thermal oxidation and its thermal desorption investigated by Si 2p core-level photoemission

Author (5)： Enta, Y. (Graduate School of Science and Technology, Hirosaki University) ,  Nakazawa, H. (Graduate School of Science and Technology, Hirosaki University) ,  Sato, S. (Graduate School of Science and Technology, Hirosaki University) ,  Kato, H. (Graduate School of Science and Technology, Hirosaki University) ,  Sakisaka, Y. (Graduate School of Science and Technology, Hirosaki University)
Material： Journal of Physics: Conference Series
Volume： 235  Issue： 1  Publication year： 2010 
JST Material Number： SCOPUS  ISSN： 1742-6588 
Country of issue： United Kingdom (GBR)  Language： English (EN)

Terms in the title (2)： ITS ,  Si