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J-GLOBAL ID：201902207820358093   Reference number：19S0743234

Three-dimensional micro modification and selective etching of crystalline silicon using 1.56-μm subpicosecond laser pulses

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Author (3)：
Matsuo, Shigeki

About Matsuo, Shigeki

(University of Tokushima)

About University of Tokushima

, 
Oda, Keiji

About Oda, Keiji

(University of Tokushima)

About University of Tokushima

, 
Naoi, Yoshiki

About Naoi, Yoshiki

(University of Tokushima)

About University of Tokushima


Material：
Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

About Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest


Publication year： 2013 
JST Material Number： SCOPUS  ISBN： 9781467364751 
Country of issue： United States (USA)  Language： English (EN)
Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
LASER

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