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J-GLOBAL ID：201902208809096717   Reference number：19S0419096

Numerical Analysis of Substrate-Incident Carbon Flux in Low-Pressure Radio-Frequency CH4 Plasmas for Deposition of Diamond-Like Carbon Films

Author (2)： Oda, Akinori (Chiba Institute of Technology) ,  Kousaka, Hiroyuki (Nagoya University)
Material： Electronics and Communications in Japan
Volume： 98  Issue： 9  Page： 31-39  Publication year： 2015 
JST Material Number： SCOPUS  ISSN： 1942-9533 
Country of issue： United States (USA)  Language： English (EN)