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J-GLOBAL ID：201902209312014659   Reference number：19S0649206

Piezoelectric MEMS devices and its application as bio-chemical sensors

Author (7)： Lu, J. (Research Center for Ubiquitous MEMS and Micro Engineering, AIST) ,  Zhang, L. (Research Center for Ubiquitous MEMS and Micro Engineering, AIST) ,  Takagi, H. (Research Center for Ubiquitous MEMS and Micro Engineering, AIST) ,  Itoh, T. (Research Center for Ubiquitous MEMS and Micro Engineering, AIST) ,  Maeda, R. (Research Center for Ubiquitous MEMS and Micro Engineering, AIST) ,  Sagawa, T. (Department of Mechanical Engineering, Ibaraki University) ,  Wang, D. F. (Department of Mechanical Engineering, Ibaraki University)
Material： 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Page： 163-166  Publication year： 2013 
JST Material Number： SCOPUS  ISBN： 9781467363525 
Country of issue： United States (USA)  Language： English (EN)

Terms in the title (2)： MEMS ,  ITS