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J-GLOBAL ID：201902209518393540   Reference number：19S0922482

Room temperature bonding of wafers with thin nanocrystalline metal films

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Author (2)：
Shimatsu, T.

About Shimatsu, T.

(RIEC, Tohoku University)

About RIEC, Tohoku University

, 
Uomoto, M.

About Uomoto, M.

(RIEC, Tohoku University)

About RIEC, Tohoku University


Material：
ECS Transactions

About ECS Transactions


Volume： 33  Issue： 4  Page： 61-72  Publication year： 2010 
JST Material Number： SCOPUS  ISSN： 1938-5862  ISBN： 9781566778237 
Country of issue： United States (USA)  Language： English (EN)

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