About Yamamura, K.
About Research Center for Ultra-precision Science and Technology, Graduate School of Engineering, Osaka University
About Takiguchi, T.
About Research Center for Ultra-precision Science and Technology, Graduate School of Engineering, Osaka University
About Zettsu, N.
About Research Center for Ultra-precision Science and Technology, Graduate School of Engineering, Osaka University
About Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010