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J-GLOBAL ID：201902209859437031   Reference number：19S1273905

A feasibility study on elliptical ultrasonic assisted grinding of sapphire substrate

Author (6)： Liang, Zhiqiang (Key Laboratory of Fundamental Science for Advanced Machining, Beijing Institute of Technology) ,  Wang, Xibin (Key Laboratory of Fundamental Science for Advanced Machining, Beijing Institute of Technology) ,  Zhao, Wenxiang (Key Laboratory of Fundamental Science for Advanced Machining, Beijing Institute of Technology) ,  Wu, Yongbo (Department of Machine Intelligence and Systems Engineering, Akita Prefectural University) ,  Sato, Takashi (Department of Machine Intelligence and Systems Engineering, Akita Prefectural University) ,  Lin, Weimin (Department of Machine Intelligence and Systems Engineering, Akita Prefectural University)
Material： International Journal of Abrasive Technology
Volume： 3  Issue： 3  Page： 190-202  Publication year： 2010 
JST Material Number： SCOPUS  ISSN： 1752-2641 
Country of issue： Switzerland (CHE)  Language： English (EN)