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J-GLOBAL ID：201902209901485718   Reference number：19S0007032

Effect of surface alteration of hydride titanium washers on discharge characteristics of plasma gun

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Author (4)：
Wada, Tomoki

About Wada, Tomoki

(Kyoto Institute of Technology, Department of Electronics, Matsugasaki)

About Kyoto Institute of Technology, Department of Electronics, Matsugasaki

, 
Himura, Haruhiko

About Himura, Haruhiko

(Kyoto Institute of Technology, Department of Electronics, Matsugasaki)

About Kyoto Institute of Technology, Department of Electronics, Matsugasaki

, 
Masamune, Sadao

About Masamune, Sadao

(Kyoto Institute of Technology, Department of Electronics, Matsugasaki)

About Kyoto Institute of Technology, Department of Electronics, Matsugasaki

, 
Takeuchi, Nobuyuki

About Takeuchi, Nobuyuki

(Kyoto Institute of Technology, Department of Chemistry and Materials Technology, Matsugasaki)

About Kyoto Institute of Technology, Department of Chemistry and Materials Technology, Matsugasaki


Material：
Vacuum

About Vacuum


Volume： 84  Issue： 5  Page： 564-567  Publication year： 2009 
JST Material Number： SCOPUS  ISSN： 0042-207X  CODEN： VACUA 
Country of issue： United Kingdom (GBR)  Language： English (EN)

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