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J-GLOBAL ID：201902210082776501   Reference number：19S0371670

The measurement of an aspherical mirror by three-dimensional nanoprofiler

Author (9)： Tokuta, Yusuke (Department of Precision Science, Graduate School of Osaka University) ,  Okita, Kenya (Department of Precision Science, Graduate School of Osaka University) ,  Okuda, Kohei (Department of Precision Science, Graduate School of Osaka University) ,  Kitayama, Takao (Department of Precision Science, Graduate School of Osaka University) ,  Nakano, Motohiro (Department of Precision Science, Graduate School of Osaka University) ,  Nakatani, Shun (Osaka University Research Center for Ultra-Precision Science and Technology) ,  Kudo, Ryota (Osaka University Research Center for Ultra-Precision Science and Technology) ,  Yamamura, Kazuya (Osaka University Research Center for Ultra-Precision Science and Technology) ,  Endo, Katsuyoshi (Osaka University Research Center for Ultra-Precision Science and Technology)
Material： Proceedings of SPIE - The International Society for Optical Engineering
Volume： 9628  Publication year： 2015 
JST Material Number： SCOPUS  ISSN： 0277-786X  ISBN： 9781628418170  CODEN： PSISD 
Country of issue： United States (USA)  Language： English (EN)