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J-GLOBAL ID：201902210112418184   Reference number：19S0020433

Frozen-in vacancies in PVD-Cu films with improved high-pressure reflowability studied using a slow positron beam

Author (8)： Yabuuchi, A. (Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University) ,  Kubo, D. (Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University) ,  Mizuno, M. (Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University) ,  Mizuno, M. (Center for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University) ,  Araki, H. (Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University) ,  Araki, H. (Center for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University) ,  Onishi, T. (Materials Research Laboratory, Kobe Steel Ltd.) ,  Shirai, Y. (Department of Materials Science and Engineering, Graduate School of Engineering, Kyoto University)
Material： Journal of Physics: Conference Series
Volume： 165  Publication year： 2009 
JST Material Number： SCOPUS  ISSN： 1742-6588 
Country of issue： United Kingdom (GBR)  Language： English (EN)