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J-GLOBAL ID：201902210294656093   Reference number：19S1369387

Development of small sized FE-SEM equipped with a carbon nanotube field emitter

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Author (6)：
Saito, Yahachi

About Saito, Yahachi

(Dept. of Quantum Engineering, Nagoya University)

About Dept. of Quantum Engineering, Nagoya University

, 
Oishi, Shunya

About Oishi, Shunya

(Dept. of Quantum Engineering, Nagoya University)

About Dept. of Quantum Engineering, Nagoya University

, 
Yamazaki, Shintaro

About Yamazaki, Shintaro

(Dept. of Quantum Engineering, Nagoya University)

About Dept. of Quantum Engineering, Nagoya University

, 
Nakahara, Hitoshi

About Nakahara, Hitoshi

(Dept. of Quantum Engineering, Nagoya University)

About Dept. of Quantum Engineering, Nagoya University

, 
Murata, Hidekazu

About Murata, Hidekazu

(Dept. of Electric and Electronic Engineering, Meijo University)

About Dept. of Electric and Electronic Engineering, Meijo University

, 
Ohno, Teruaki

About Ohno, Teruaki

(Technex Lab Co.)

About Technex Lab Co.


Material：
2016 29th International Vacuum Nanoelectronics Conference, IVNC 2016

About 2016 29th International Vacuum Nanoelectronics Conference, IVNC 2016


Publication year： 2016 
JST Material Number： SCOPUS  ISBN： 9781509024193 
Country of issue： United States (USA)  Language： English (EN)

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