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J-GLOBAL ID：201902212182208473   Reference number：19S1462529

Development of polymer MEMS process technology as an approach to a sustainable production system

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Author (3)：
Sugiyama, Susumu

About Sugiyama, Susumu

(Research Institute for Nanomachine System Technology, Ritsumeikan University)

About Research Institute for Nanomachine System Technology, Ritsumeikan University

, 
Dao, Dzung Viet

About Dao, Dzung Viet

(Research Institute for Nanomachine System Technology, Ritsumeikan University)

About Research Institute for Nanomachine System Technology, Ritsumeikan University

, 
Amaya, Satoshi

About Amaya, Satoshi

(TOWA Corporation)

About TOWA Corporation


Material：
Advances in Natural Sciences: Nanoscience and Nanotechnology

About Advances in Natural Sciences: Nanoscience and Nanotechnology


Volume： 3  Issue： 1  Publication year： 2012 
JST Material Number： SCOPUS  ISSN： 2043-6262 
Country of issue： United Kingdom (GBR)  Language： English (EN)
Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
MEMS

About MEMS


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