Art

J-GLOBAL ID：201902213203965896   Reference number：19S0691447

Thermo-molecular gas-film lubrication (t-MGL) analysis for MEMS elements (application to hdd flying heads)

Author (5)： Fukui, Shigehisa (Department of Mechanical and Aerospace Engineering, Graduate School of Engineering, Tottori University) ,  Kitagawa, Naoya (Department of Mechanical and Aerospace Engineering, Graduate School of Engineering, Tottori University) ,  Wakabayashi, Ryo (Department of Mechanical and Aerospace Engineering, Graduate School of Engineering, Tottori University) ,  Matsuoka, Hiroshige (Department of Mechanical and Aerospace Engineering, Graduate School of Engineering, Tottori University) ,  Yamane, Kiyomi (Department of Mechanical Engineering, Matsue National College of Technology)
Material： 5th World Tribology Congress, WTC 2013
Volume： 2  Page： 1837-1840  Publication year： 2013 
JST Material Number： SCOPUS  ISBN： 9781634393522 
Country of issue： United States (USA) 

Terms in the title (2)： MEMS ,  HDD