Art

J-GLOBAL ID：201902213889950644   Reference number：19S0626849

Dual-axis polymer-MEMS mirror made of Photosensitive Nanocomposite

Author (8)： Suzuki, Junya (Department of Intelligent Mechanical Systems Engineering, Kagawa University) ,  Miura, Takuya (Department of Intelligent Mechanical Systems Engineering, Kagawa University) ,  Terao, Kyohei (Department of Intelligent Mechanical Systems Engineering, Kagawa University) ,  Takao, Hidekuni (Department of Intelligent Mechanical Systems Engineering, Kagawa University) ,  Shimokawa, Fusao (Department of Intelligent Mechanical Systems Engineering, Kagawa University) ,  Oohira, Fumikazu (Department of Intelligent Mechanical Systems Engineering, Kagawa University) ,  Suzuki, Takaaki (Department of Intelligent Mechanical Systems Engineering, Kagawa University) ,  Namazu, Takahiro (Department of Mechanical and Systems Engineering, University of Hyogo)
Material： International Conference on Optical MEMS and Nanophotonics
Page： 101-102  Publication year： 2013 
JST Material Number： SCOPUS  ISSN： 2160-5033  ISBN： 9781479915125 
Country of issue： United States (USA)  Language： English (EN)