Art

J-GLOBAL ID：201902214985706556   Reference number：19S1765459

Development of the micro-mirror with large scaning angle using FE-based metallic glass thin film

Author (8)： Lee, Jae-Wung (WPI Advanced Institute, Materials Research Tohoku University) ,  Lin, Yu-Ching (WPI Advanced Institute, Materials Research Tohoku University) ,  Kaushik, Neelam (WPI Advanced Institute, Materials Research Tohoku University) ,  Esashi, Masayoshi (WPI Advanced Institute, Materials Research Tohoku University) ,  Sharma, Parmanand (Institute for Materials Research, Tohoku University) ,  Inoue, Akihisa (Institute for Materials Research, Tohoku University) ,  Gessner, Thomas (Fraunhofer ENAS) ,  Gessner, Thomas (Chemnitz University of Technology)
Material： 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Page： 2912-2915  Publication year： 2011 
JST Material Number： SCOPUS  ISBN： 9781457701573 
Country of issue： United States (USA)  Language： English (EN)