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J-GLOBAL ID：201902215295486991   Reference number：19S1969587

Evaluation of gas cluster ion beam processing for sealing of a porous dielectric

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Author (9)：
Brongersma, S. H.

About Brongersma, S. H.

(IMEC)

About IMEC

, 
Beyer, G.

About Beyer, G.

(IMEC)

About IMEC

, 
Travaly, Y.

About Travaly, Y.

(IMEC)

About IMEC

, 
Le, T. Q.

About Le, T. Q.

(IMEC)

About IMEC

, 
Caluwaerts, R.

About Caluwaerts, R.

(IMEC)

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, 
Sherman, S.

About Sherman, S.

(Epion Corporation)

About Epion Corporation

, 
Tabat, M.

About Tabat, M.

(Epion Corporation)

About Epion Corporation

, 
Hautala, J.

About Hautala, J.

(Epion Corporation)

About Epion Corporation

, 
Patz, M.

About Patz, M.

(JSR Corporation)

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Material：
Advanced Metallization Conference (AMC)

About Advanced Metallization Conference (AMC)


Page： 463-468  Publication year： 2004 
JST Material Number： SCOPUS  ISSN： 1540-1766  CODEN： MRSPD 
Country of issue： United States (USA)  Language： English (EN)

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