Art

J-GLOBAL ID：201902215588189142   Reference number：19S0400857

Driving DSA into volume manufacturing

Author (22)： Somervell, Mark (Tokyo Electron America, Inc.) ,  Rathsack, Benjamen (Tokyo Electron America, Inc.) ,  Yamauchi, Takashi (Tokyo Electron Kyushu Ltd.) ,  Okada, Soichiro (Tokyo Electron Kyushu Ltd.) ,  Tomita, Tadatoshi (Tokyo Electron Kyushu Ltd.) ,  Nishi, Takanori (Tokyo Electron Kyushu Ltd.) ,  Kawakami, Shinichiro (Tokyo Electron Kyushu Ltd.) ,  Muramatsu, Makoto (Tokyo Electron Kyushu Ltd.) ,  Kitano, Takahiro (Tokyo Electron Kyushu Ltd.) ,  Iijima, Etsuo (Tokyo Electron Miyagi Ltd.) ,  Rastogi, Vinayak (TEL Technology Center, America, LLC) ,  Parnell, Doni (TEL Technology Center, America, LLC) ,  Nakano, Takeo (Tokyo Electron Ltd.) ,  Iwao, Fumiko (Tokyo Electron Ltd.) ,  Nagahara, Seiji (Tokyo Electron Ltd.) ,  Iwaki, Hiroyuki (Tokyo Electron Ltd.) ,  Dojun, Makiko (Tokyo Electron Ltd.) ,  Yatsuda, Koichi (Tokyo Electron Ltd.) ,  Tobana, Toshikatsu (Tokyo Electron Ltd.) ,  Negreira, Ainhoa Romo (Tokyo Electron Ltd., Assignee to IMEC) ,  Nafus, Kathleen (Tokyo Electron Ltd., Assignee to IMEC) ,  Peyre, Jean-Luc (Tokyo Electron Europe Ltd.)
Material： Proceedings of SPIE - The International Society for Optical Engineering
Volume： 9425  Publication year： 2015 
JST Material Number： SCOPUS  ISSN： 0277-786X  ISBN： 9781628415278  CODEN： PSISD 
Country of issue： United States (USA)  Language： English (EN)

Terms in the title (1)： DSA