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J-GLOBAL ID:201902215759869171   Reference number:19A1522315

Challenges for precision tracking control by pneumatic actuators

空気圧アクチュエータによる精密位置決めへの挑戦
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Issue: MAG-19-040-066/LD-19-028-054 マグネティックス研究会/リニアドライブ研究会  Page: 1-6  Publication year: Jun. 27, 2019 
JST Material Number: Z0924B  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Electric control equipment  ,  Fluidic control equipment 
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