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J-GLOBAL ID：201902216316755676   Reference number：19S1388700

Design and fabrication of a diffractive beam splitter for dual-wavelength and concurrent irradiation of process points

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Author (2)：
Amako, Jun

About Amako, Jun

(Graduate School of Science and Engineering, Toyo University)

About Graduate School of Science and Engineering, Toyo University

, 
Shinozaki, Yu

About Shinozaki, Yu

(Graduate School of Science and Engineering, Toyo University)

About Graduate School of Science and Engineering, Toyo University


Material：
Optics Express

About Optics Express


Volume： 24  Issue： 14  Page： 16111-16122  Publication year： 2016 
JST Material Number： SCOPUS  ISSN： 1094-4087 
Country of issue： United States (USA)  Language： English (EN)
Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
DESIGN

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