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J-GLOBAL ID：201902217687006095   Reference number：19S0620750

Measurements of SiH4/H2 VHF plasma parameters with heated langmuir probe

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Author (7)：
Yamane, T.

About Yamane, T.

(Solar Power Department, Mitsubishi Heavy Industries Ltd.)

About Solar Power Department, Mitsubishi Heavy Industries Ltd.

, 
Nakao, S.

About Nakao, S.

(Solar Power Department, Mitsubishi Heavy Industries Ltd.)

About Solar Power Department, Mitsubishi Heavy Industries Ltd.

, 
Takeuchi, Y.

About Takeuchi, Y.

(Solar Power Department, Mitsubishi Heavy Industries Ltd.)

About Solar Power Department, Mitsubishi Heavy Industries Ltd.

, 
Muta, H.

About Muta, H.

(Interdisciplinary Graduate School of Engineering Sciences, Kyushu University)

About Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

, 
Uchino, K.

About Uchino, K.

(Interdisciplinary Graduate School of Engineering Sciences, Kyushu University)

About Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

, 
Kawai, Y.

About Kawai, Y.

(Interdisciplinary Graduate School of Engineering Sciences, Kyushu University)

About Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

, 
Ichiki, R.

About Ichiki, R.

(Department of Electrical and Electronic Engineering, Oita University)

About Department of Electrical and Electronic Engineering, Oita University


Material：
Contributions to Plasma Physics

About Contributions to Plasma Physics


Volume： 53  Issue： 8  Page： 588-591  Publication year： 2013 
JST Material Number： SCOPUS  ISSN： 0863-1042 
Country of issue： Germany (DEU)  Language： English (EN)
Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
SiH4

About SiH4

, 
H2

About H2

, 
VHF

About VHF


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