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J-GLOBAL ID：201902217970598535   Reference number：19S0382319

Systematic error analysis for 3D nanoprofiler tracing normal vector

Author (5)： Kudo, Ryota (Research Center for Ultra-Precision Science and Technology, Osaka University) ,  Yamamura, Kazuya (Research Center for Ultra-Precision Science and Technology, Osaka University) ,  Endo, Katsuyoshi (Research Center for Ultra-Precision Science and Technology, Osaka University) ,  Tokuta, Yusuke (Department of Precision Science and Technology, Graduate School of Engineering, Osaka University) ,  Nakano, Motohiro (Department of Precision Science and Technology, Graduate School of Engineering, Osaka University)
Material： Proceedings of SPIE - The International Society for Optical Engineering
Volume： 9633  Publication year： 2015 
JST Material Number： SCOPUS  ISSN： 0277-786X  ISBN： 9781628418385  CODEN： PSISD 
Country of issue： United States (USA)  Language： English (EN)

Terms in the title (1)： 3D