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J-GLOBAL ID：201902218403381050   Reference number：19S0498283

Vacuum ultraviolet ellipsometer using inclined detector as analyzer to measure stokes parameters and optical constants - With results for AlN optical constants

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Author (7)：
Saito, T.

About Saito, T.

(Faculty of Engineering, Tohoku Inst. Tech.)

About Faculty of Engineering, Tohoku Inst. Tech.

, 
Ozaki, K.

About Ozaki, K.

(Faculty of Engineering, Univ. of Fukui)

About Faculty of Engineering, Univ. of Fukui

, 
Fukui, K.

About Fukui, K.

(Faculty of Engineering, Univ. of Fukui)

About Faculty of Engineering, Univ. of Fukui

, 
Iwai, H.

About Iwai, H.

(Faculty of Engineering, Univ. of Fukui)

About Faculty of Engineering, Univ. of Fukui

, 
Yamamoto, K.

About Yamamoto, K.

(Res. Center for Devel. of FIR Region, Univ. of Fukui)

About Res. Center for Devel. of FIR Region, Univ. of Fukui

, 
Miyake, H.

About Miyake, H.

(Faculty of Engineering, Mie Univ.)

About Faculty of Engineering, Mie Univ.

, 
Hiramatsu, K.

About Hiramatsu, K.

(Faculty of Engineering, Mie Univ.)

About Faculty of Engineering, Mie Univ.


Material：
Thin Solid Films

About Thin Solid Films


Volume： 571  Issue： P3  Page： 517-521  Publication year： 2014 
JST Material Number： SCOPUS  ISSN： 0040-6090  CODEN： THSFA 
Country of issue： Netherlands (NLD)  Language： English (EN)
Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
AlN

About AlN


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