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J-GLOBAL ID：201902218834325442   Reference number：19A2691832

Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching

RFプラズマエッチングによるホウ素ドープダイヤモンド膜の自己マスキング・ナノ構造化の研究【JST・京大機械翻訳】

Author (9)： Marton Marian (Institute of Electronics and Photonics, FEI STU in Bratislava, Ilkovicova 3, 812 19, Bratislava, Slovakia) ,  Ritomsky Mario (Institute of Informatics, Slovak Academy of Sciences, Dubravska Cesta 9, 845 07, Bratislava, Slovakia) ,  Michniak Pavol (Institute of Electronics and Photonics, FEI STU in Bratislava, Ilkovicova 3, 812 19, Bratislava, Slovakia) ,  Behul Miroslav (Institute of Electronics and Photonics, FEI STU in Bratislava, Ilkovicova 3, 812 19, Bratislava, Slovakia) ,  Rehacek Vlastimil (Institute of Electronics and Photonics, FEI STU in Bratislava, Ilkovicova 3, 812 19, Bratislava, Slovakia) ,  Redhammer Robert (Institute of Electronics and Photonics, FEI STU in Bratislava, Ilkovicova 3, 812 19, Bratislava, Slovakia) ,  Vincze Andrej (International Laser Centre, Ilkovicova 3, 84104, Bratislava, Slovakia) ,  Papula Martin (Central European Institute of Technology, Brno University of Technology, Purkynova 123, 612 00, Brno, Czech Republic) ,  Vojs Marian (Institute of Electronics and Photonics, FEI STU in Bratislava, Ilkovicova 3, 812 19, Bratislava, Slovakia)
Material： Vacuum
Volume： 170  Page： Null  Publication year： 2019 
JST Material Number： E0347A  ISSN： 0042-207X  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Abstract/Point： The surface nanostructuring of...

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Thesaurus term： *nanostructure ,  characterization ,  *etching ,  Raman spectroscopy ,  quality ,  *plasma etching ,  carbon ,  ion ,  *masking ,  *diamond ,  amorphous state ,  *plasma ,  sensor ,  electrochemistry
Semi thesaurus term： *RFプラズマ , 【Automatic Indexing@JST】

Author keywords (4)： Boron doped diamond ,  Plasma etching ,  Self-masking ,  Nanostructured surface

JST classification (4)： Thin films of other inorganic compounds  (BK14060A) ,  Manufacturing technology of solid-state devices  (NC03030V) ,  Oxide thin films  (BK14050P) ,  Electric conduction in crystalline semiconductors  (BM03043X)

Terms in the title (7)： RFプラズマ ,  エッチング ,  ホウ素ドープダイヤモンド ,  自己 ,  マスキング ,  構造化 ,  研究